| 摘要 |
A piezoelectric/electrostrictive device (10A) comprises a pair of mutually opposing thin plate sections (16a,16b), a movable section (20), and a fixation section (22) for supporting the thin plate sections (16a,16b) and the movable section (20); piezoelectric/electrostrictive elements (24a,24b) arranged on at least one thin plate sections (16a,16b) of the pair of thin plate sections (16a,16b); and a hole (12) formed by both inner walls of the pair of thin plate sections (16a,16b), an inner wall (20a) of the movable section (20), and an inner wall (22a) of the fixation section (22), wherein the pair of thin plate sections (16a,16b) are made of metal. Preferably the piezoelectric/electrostrictive elements (24a,24b) are multilayer stacks comprising the active material (26) and electrode layers (28,30). Accordingly, it is possible to realize a long life time of the device, increase the displacement of the movable section, and realize a high speed (realize a high resonance frequency). Further, it is possible to improve the handling performance of the device and the performance for attaching a part to the movable section or the performance for fixing the device. <IMAGE> |
