CHAMBER STRUCTURE WITH PROTRUDED CONNECTIONS TO PREVENT DAMAGE OF SEALING MEMBER

摘要

PURPOSE: A chamber structure is provided to improve sealing effect by preventing the damage of a sealing member such as an O-ring using an enhanced connection between a lower chamber and a chamber lead. CONSTITUTION: A chamber structure includes a lower chamber(210) and a chamber lead(200). A sealing member(120) is installed between the lower chamber and the chamber lead. At this time, connecting portions of the lower chamber and the chamber lead are protruded in order to prevent chemical gas from contacting the sealing member.