发明名称 System and method for filtering output in mass flow controllers and mass flow meters
摘要 Embodiments of the present invention provide a method for filtering an indicated flow. One embodiment of the present invention can include the steps of (i) determining if the indicated flow is within an allowable deviation of a baseline, (ii) if the indicated flow is within the allowable deviation, outputting the indicated flow as the filtered indicated flow, and (iii) if the indicated flow is not within the allowable deviation, outputting a value that is within the predefined range as the filtered indicated flow. This embodiment of the present invention can also include determining if the indicated flow exceeds a buffer. If the indicated flow does not exceed the buffer, one embodiment of the present invention can continue to output the value that is within the allowable deviation.
申请公布号 US6865520(B2) 申请公布日期 2005.03.08
申请号 US20020133110 申请日期 2002.04.26
申请人 MYKROLIS CORPORATION 发明人 TARIQ FAISAL
分类号 G01F1/00;G01F1/696;G05B11/42;G05B13/02;(IPC1-7):G06F15/00 主分类号 G01F1/00
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