发明名称 Apodized micro-lenses for Hartmann wavefront sensing and method for fabricating desired profiles
摘要 An optical element which controls both the phase and irradiance distribution, thereby completely specifying the E-field, of light, allowing completely arbitrary control of the light at any plane. Such an optical element includes a portion that controls the phase and a portion that controls the irradiance. The portion that controls the irradiance is an apodized irradiance mask having its transmission varying with position in a controlled fashion. This apodized irradiance mask is preferably a pattern of metal. In order to insure a smoothly varying pattern of metal with minimized diffraction effects, a very thin mask spaced from a substrate is used to provide the metal on the substrate. The apodized irradiance mask may be placed directly on the phase control portion, or may be on an opposite side of a substrate of the phase controlled portion.
申请公布号 US6864043(B2) 申请公布日期 2005.03.08
申请号 US20030673569 申请日期 2003.09.30
申请人 WAVEFRONT SCIENCES, INC. 发明人 NEAL DANIEL R.;MANSELL JUSTIN D.
分类号 G01J9/00;G02B3/00;G02B27/58;(IPC1-7):G03F7/00 主分类号 G01J9/00
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