Apparatus for controlling rapid thermal processing apparatus using light illumination,申请号KR20000059069-传众专利搜索

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发明名称	Apparatus for controlling rapid thermal processing apparatus using light illumination
摘要
申请公布号	KR100475353(B1)	申请公布日期	2005.03.08
申请号	KR20000059069	申请日期	2000.10.07
申请人		发明人
分类号	H01L21/26;H01L21/324;H01L21/00;H05B37/02;(IPC1-7):H01L21/324	主分类号	H01L21/26
代理机构		代理人
主权项
地址

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