发明名称 Via density rules
摘要 Thermo-mechanical stress on vias is reduced, thereby reducing related failures. This can be done by maintaining a via-to-metal area ratio at least as large as a predetermined value below which the additional stress on the vias does not significantly increase.
申请公布号 US6864171(B1) 申请公布日期 2005.03.08
申请号 US20030682462 申请日期 2003.10.09
申请人 INFINEON TECHNOLOGIES AG 发明人 HOINKIS MARK D.;HIERLEMANN MATTHIAS P.;FAYAZ MOHAMMED FAZIL;COWLEY ANDY;KALTALIOGLU ERDUM
分类号 G06F17/50;H01L21/768;H01L23/522;(IPC1-7):H01L21/476 主分类号 G06F17/50
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