发明名称 |
Method and apparatus for fabricating self-assembling microstructures |
摘要 |
A method and apparatus for assembling microstructures onto a substrate through fluid transport. The microstructures being shaped blocks self-align into recessed regions located on a substrate such that the microstructure becomes integral with the substrate. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then dispensed evenly or circulated over the top surface of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region.
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申请公布号 |
US6864570(B2) |
申请公布日期 |
2005.03.08 |
申请号 |
US20010877640 |
申请日期 |
2001.06.08 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
SMITH JOHN STEPHEN |
分类号 |
G02F1/136;G02F1/1362;G02F1/1368;H01L21/58;H01L21/68;H01L21/98;H01L23/13;H01L23/14;H01L25/065;H01L29/06;H01S5/022;H01S5/40;(IPC1-7):H01L29/72 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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