Manufacturing method for an ink jet recording head

摘要

An ink jet recording head manufacturing method is provided comprising: forming a peeling layer wherein peeling is induced by light irradiation on a base plate exhibiting light-transmissivity; forming a common electrode film on the peeling layer; forming a plurality of piezoelectric elements, forming a reservoir piece including a lid structure that accommodates one or more piezoelectric elements in an interior which forms an ink reservoir; irradiating the peeling layer with prescribed light from the base plate side to induce peeling; peeling the base plate away; and bonding a pressure chamber plate provided with a plurality of pressure chambers to the common electrode film separated from the base plate so that the pressure chambers are sealed.