Ethanol and volatility sensor and fabrication method

摘要

In one embodiment, a method for forming the sensor comprises: disposing capacitance electrodes and a heater on green layers; disposing the layers such that the capacitance electrodes are disposed between adjacent green layers and the heater is disposed on a side of a green layer opposite one of the capacitance electrodes; disposing a gap insert in physical contact with the capacitance electrodes, wherein the gap insert has a higher sintering temperature than the green layers; sintering the green layers; and removing the gap insert.