发明名称 |
Chromeless phase shift mask using non-linear optical materials |
摘要 |
An attenuated phase shift mask is formed using a non-linear optical material for both fiducial features and pattern features. The non-linear optical material selected has predetermined transmission at the actinic exposure wavelength and a smaller transmission at the fiducial recognition wavelengths.
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申请公布号 |
US6864020(B1) |
申请公布日期 |
2005.03.08 |
申请号 |
US20020328346 |
申请日期 |
2002.12.24 |
申请人 |
LSI LOGIC CORPORATION |
发明人 |
TARAVADE KUNAL;CALLAN NEAL |
分类号 |
G03F1/00;G03F1/08;G03F1/10;G03F1/14;G03F9/00;(IPC1-7):G03F9/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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