| 摘要 |
PURPOSE: A beam quality improvement apparatus in process is provided to stabilize a fabrication process, reduce a process time, and improve a throughput by reducing a blow-up phenomenon due to beam current loss and increasing beam purity. CONSTITUTION: An arc chamber(16) is used for ionizing internal gas. An arc slit(18) is attached to the arc chamber. The ionized beams are irradiated to the outside of the arc slit. A suppression electrode(22) is used for transmitting the beams through the arc slit. A ground electrode(24b) is used for transmitting the ionized beams through the suppression electrode. An insulator(28) is attached to an inner surface of the suppression electrode. A graphite part(26) is attached to the insulator in order to prevent abrasion of the arc slit, the suppression electrode, and the ground electrode.
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