发明名称 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device
摘要 This invention relates to a method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of: including, in said transmission electron microscope, an atomic force microscopy device. This invention also relates to a transmission electron microscopy device, characterised in that a transmission electron microscope is combined with an atomic force microscope, positioned within said transmission electron microscope. Finally, the invention relates to a device for insertion in a transmission electron microscope, characterised in that said device comprises an atomic force microscopy device.
申请公布号 US6864483(B2) 申请公布日期 2005.03.08
申请号 US20020203475 申请日期 2002.12.02
申请人 NANOFACTORY INSTRUMENTS AB 发明人 OLIN HAAKAN
分类号 G01B21/30;G01Q20/00;G01Q20/02;G01Q30/20;G01Q60/24;G01Q70/10;H01J37/20;H01J37/26;H01J37/28;(IPC1-7):H01J37/26 主分类号 G01B21/30
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