MICRO LINEAR MOTOR CAPABLE OF ACCURATELY CONTROLLING POSITION OF MOVER AND ELIMINATING BEARING

摘要

PURPOSE: A micro linear motor is provided to eliminate a bearing and accurately control the position of a mover in lateral and yawing directions. CONSTITUTION: A micro linear motor comprises a mover(30) and a stator(40). The mover is extended in a lengthwise direction, and has a plurality of teeth(34) formed at both sides of the mover. The stator includes a plurality of electrodes(44) arranged at both sides of the mover such that the electrodes correspond to the teeth of the mover. From among the electrodes, two electrodes respectively corresponding to one tooth at the front portion of the mover and one tooth at the rear portion of the mover, are formed into a group. Each group receives a phase voltage and applies the received voltage to the front portion and the rear portion of the mover, respectively. The micro linear motor further includes a unit for measuring lateral displacements of the front portion and the rear portion of the mover, respectively; and a control unit for receiving the lateral displacement of the mover, calculating a control voltage for controlling voltages such that gaps between the mover and the stators becomes the same, and subtracting/adding the calculated voltage from/to the phase voltage, and applying the voltage to the electrodes of the stator.