METHOD FOR FORMING LINE AND PLUG METAL WIRE CAPABLE OF REDUCING DAMAGE OF UNDER LAYER,申请号KR19990025896-传众专利搜索

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发明名称	METHOD FOR FORMING LINE AND PLUG METAL WIRE CAPABLE OF REDUCING DAMAGE OF UNDER LAYER
摘要
申请公布号	KR100472722(B1)	申请公布日期	2005.03.07
申请号	KR19990025896	申请日期	1999.06.30
申请人		发明人
分类号	H01L21/82;(IPC1-7):H01L21/82	主分类号	H01L21/82
代理机构		代理人
主权项
地址

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