发明名称 Method for nano-scale patterning
摘要 A method for nano-scale high resolution patterning of self-assembled monolayer using soft X-rays is provided. The method involves forming an aromatic imine molecular layer having substituents at its terminal rings on a substrate, selectively cleaving bonds to the subsituents of the aromatic imine molecular layer, and hydrolyzing the aromatic imine molecular layer
申请公布号 KR100473799(B1) 申请公布日期 2005.03.07
申请号 KR20010056221 申请日期 2001.09.12
申请人 发明人
分类号 G03F7/00;G03F7/075;G03F7/004;G03F7/16;G03F7/20;H01L21/027;H01L21/033;(IPC1-7):G03F7/00 主分类号 G03F7/00
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