METHOD FOR FABRICATING ELECTRONIC DEVICE TO FORM ORGANIC THIN FILM OF LOW DIELECTRIC CONSTANT

摘要

PURPOSE: A method for fabricating an electronic device is provided to form an organic thin film of a low dielectric constant by improving cohesion between an inorganic thin film and an organic thin film and by avoiding delamination or a crack during a process for forming a multilayered interconnection. CONSTITUTION: Organic radicals are introduced to the surface of an inorganic layer to vary the surface characteristic of the inorganic layer having a contact angle of 50 degrees with water. A fluorinated aromatic hydrocarbon polymer material is analyzed to form a precursor. The precursor is deposited on the inorganic layer to form a fluorinated aromatic hydrocarbon polymer layer on the inorganic layer.