发明名称 METHOD FOR MANUFACTURING CERAMIC GREEN SHEET, CAPABLE OF REDUCING VARIATIONS IN SURFACE UNIFORMITY OR THICKNESS OF CERAMIC GREEN SHEET OF ELECTRODE LAYER, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT USING THE SAME
摘要 PURPOSE: A method for manufacturing a ceramic green sheet and a method for manufacturing an electronic component are provided to reduce variations in surface uniformity or thickness of a ceramic green sheet or an electrode layer, and form concave portions and convex portions in a sheet and a layer in a high accuracy. CONSTITUTION: A method for manufacturing a ceramic green sheet comprises a step of attaching a photosensitive material containing powder having specific electrical characteristics to the front surface of a member having a portion for transmission of light to be used in an exposure process; a step of shaping the light into a first pattern, and irradiating light to the photosensitive material from the back side of the member such that the exposure process is performed with the exposure amount which permits only a portion of the photosensitive material within a predetermined first thickness to endure the exposure; a step of shaping the light into a second pattern, and irradiating light to the photosensitive material from the back side of the member such that the exposure process is performed with the exposure amount which permits only a portion of the photosensitive material within a second predetermined thickness to endure the exposure; and a step of performing a development process on the photosensitive material after completion of the exposure process. The photosensitive material is photosensitive to the light, and the front surface is a surface on which a sheet is to be formed.
申请公布号 KR20050021866(A) 申请公布日期 2005.03.07
申请号 KR20040067708 申请日期 2004.08.27
申请人 TDK CORPORATION 发明人 AOKI SHUNJI;SUTOH JUNICHI;WATANABE GENICHI;YOSHIDA MASAYUKI
分类号 H01G4/12;B32B18/00;C04B35/468;G03F7/20;H01F41/00;H01F41/04;H01F41/34;H01G4/30;H01G4/40;H01G13/00;H05K1/03;H05K3/00;H05K3/10;H05K3/12;H05K3/40;H05K3/46;(IPC1-7):H01F41/00 主分类号 H01G4/12
代理机构 代理人
主权项
地址