EXCIMER DISCHARGE LAMP DIMMING SYSTEM CAPABLE OF STABLY CARRYING OUT LAMP DIMMING OPERATION

摘要

PURPOSE: An excimer discharge lamp dimming system is provided to perform a lamp dimming operation in a stable manner over a wide range. CONSTITUTION: A excimer discharge lamp dimming system performs a dimming operation by applying a high frequency voltage of kHz band or higher to an excimer discharge lamp such that the frequency of the high frequency voltage changes. The on-time per 1/2 cycle of the frequency is set such that the on-time is approximately the same as the time required for charging the electric charge which contributes to the light emission of the excimer discharge lamp. As a consequence, stable lamp dimming operation is possible.