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发明名称
CONTACT STRUCTURE FORMED BY PHOTOLITHOGRAPHY PROCESS
摘要
申请公布号
KR100472580(B1)
申请公布日期
2005.03.07
申请号
KR20000004199
申请日期
2000.01.28
申请人
发明人
分类号
H01L21/66;G01R1/067;G01R1/073;G01R3/00;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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