| 摘要 |
PURPOSE: An apparatus for driving a lift pin in semiconductor device fabricating equipment is provided to easily control an ascending speed and a descending speed of a lift pin by installing main and sub air supply units and by controlling the volume of the inside of an air tank while using the sub air supply unit. CONSTITUTION: An air tank(210) has upper and lower spaces that are divided by an intermediate layer capable of vertically transferring in the air tank. A center axis(220) penetrates the air tank and is disposed to be coupled to the intermediate layer, connected to the lift pin. The first and second main air supply lines(231,232) are selectively opened, connected to the upper and lower spaces of the air tank, respectively. A main air supply unit(230) is connected to the first and second main air supply lines. The first and second sub air supply lines(251,252) are selectively opened, connected to the upper and lower spaces of the air tank, respectively. A sub air supply unit(250) is connected to the first and second sub air supply lines.
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