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发明名称
A METHOD OF FORMING MASK
摘要
申请公布号
KR100476879(B1)
申请公布日期
2005.03.07
申请号
KR19980003121
申请日期
1998.02.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SHIN, IN GYUN;SON, JEONG MIN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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