发明名称 ATOMIC FORCE MICROSCOPE CAPABLE OF EASILY EXCHANGING CANTILEVER ACCORDING TO PERIPHERAL CONDITIONS
摘要 PURPOSE: An atomic force microscope is provided to easily and simply exchange a cantilever of the atomic force microscope by allowing a plurality of cantilevers to be exchanged in one-step operation. CONSTITUTION: An atomic force microscope includes a scanner(20) and a plurality of cantilevers(30) attached to the scanner(20). The cantilevers(30) are rotated by means of a driving unit(40). Probes(32) are provided at end portions of the cantilevers(30) in such a manner that the probes(32) are moved up and down based on interaction between the probes(32) and a surface of a sample(50). A light source(60) is provided at an upper portion of the cantilevers(30) to radiate light towards the cantilevers(30). A photo detector(70) is provided to detect the surface of the sample(50).
申请公布号 KR20050021853(A) 申请公布日期 2005.03.07
申请号 KR20030059909 申请日期 2003.08.28
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOE, HEE HWAN;JUNG, JI HOON;KIM, DAE OK;KIM, JUNG JIN;KIM, SANG GAB
分类号 G01Q60/24;G01Q10/00;G01Q20/02 主分类号 G01Q60/24
代理机构 代理人
主权项
地址