ATOMIC FORCE MICROSCOPE CAPABLE OF EASILY EXCHANGING CANTILEVER ACCORDING TO PERIPHERAL CONDITIONS
摘要
PURPOSE: An atomic force microscope is provided to easily and simply exchange a cantilever of the atomic force microscope by allowing a plurality of cantilevers to be exchanged in one-step operation. CONSTITUTION: An atomic force microscope includes a scanner(20) and a plurality of cantilevers(30) attached to the scanner(20). The cantilevers(30) are rotated by means of a driving unit(40). Probes(32) are provided at end portions of the cantilevers(30) in such a manner that the probes(32) are moved up and down based on interaction between the probes(32) and a surface of a sample(50). A light source(60) is provided at an upper portion of the cantilevers(30) to radiate light towards the cantilevers(30). A photo detector(70) is provided to detect the surface of the sample(50).
申请公布号
KR20050021853(A)
申请公布日期
2005.03.07
申请号
KR20030059909
申请日期
2003.08.28
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOE, HEE HWAN;JUNG, JI HOON;KIM, DAE OK;KIM, JUNG JIN;KIM, SANG GAB