APPARATUS AND METHOD CAPABLE OF REDUCING GENERATION OF WASTEWATER AND FORMING PLATING LAYER OF HIGH QUALITY BY PERFORMING PLATING USING SUPER CRITICAL FLUID AS SOLVENT

摘要

PURPOSE: To provide an apparatus and a method for performing plating using super critical fluid to substantially reduce generation of wastewater, thereby reduce the bad effect of environmental pollution and form a plating film having compact nickel plating structure and excellent plating quality. CONSTITUTION: The apparatus for plating a thin nickel film using super critical fluid comprises: a first storage tank(2) for storing the super critical fluid; a cooler(3) transferring the super critical fluid after cooling the super critical fluid flown in from the first storage tank; a second storage tank(9) for storing a mixed solvent of solvent, electrolyte and surfactant; a transfer part(4) comprising a mixer(42) and a transfer pump(44) for mixing the super critical fluid transferred from the first storage tank and the cooler with the mixed solvent transferred from the second storage tank; a plating pot(7) in which a nickel plate that is a plating body and a metal plate that is a plating object are stationed, and to which a power supply is impressed to perform plating reaction on the super critical fluid and the mixed solvent transferred from the transfer part; a third storage tank(6) communicated with the plating pot to recover the super critical fluid remained in the plating pot after finishing plating; a recovery pipe(10) communicated with the plating pot to recover the mixed solvent remained in the plating pot to the cooler after finishing plating; a controller(5) for controlling inflow amounts of the super critical fluid and the mixed solvent, reaction conditions in the plating pot and recovery of the super critical fluid and the mixed solvent remained after finishing plating; and a video unit(8) for observing reaction process of the plating pot.