| 摘要 |
PURPOSE: A method for manufacturing an LCD(Liquid Crystal Display) is provided to allow Al wiring of low resistance to have a single layer without use of barrier metal layer for preventing Al2SO3 formation between the Al wiring and a transparent conductive oxide layer, thereby simplifying manufacturing process of the LCD and solving the process problem due to total thickness of Al wiring and the barrier metal layer, by forming the transparent conductive oxide layer using atomic layer deposition. CONSTITUTION: A gate line, a gate insulating layer covering the gate line, an active layer on the gate insulating layer and a data line on the gate insulating layer are sequentially formed over a transparent substrate(21). The data line includes a source electrode and a drain electrode. A passivation layer is formed to cover the resultant substrate comprising the data line. A pixel electrode is formed on the passivation layer, wherein the pixel electrode is connected to the drain electrode. Herein, the data line is formed to have a single layer of Al or Al alloy, and the pixel electrode is formed of transparent conductive oxide layer(30). The transparent conductive oxide layer is formed by atomic layer deposition, thus preventing Al2SO3 formation between the data line and the pixel electrode.
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