TWO AXIS ACTUATOR WITH LARGE-AREA STAGE DISPOSED OVER DRIVING UNIT SUCH THAT AREA OF STAGE EXTENDS

摘要

PURPOSE: A two axis actuator with a large-area stage is provided to maximize an information storage capacity by disposing a stage over a driving unit so that the area of a stage can extend. CONSTITUTION: A two axis actuator comprises a substrate(10), an anchor unit(20), first driving units, second driving units, a stage, a third driving unit, a first direction transform spring unit(45), and a second direction transform spring unit(46). The anchor unit has near rectangular sides fixed on the substrate and a plurality of spaces corresponding to both sides of a first direction. The first driving units are driven in the first direction, in each of the regions formed in the vicinity of sides of a second direction vertical to the sides of the first direction. The second driving units are spaced apart upward from the substrate, and driven in a second direction, in each of the regions formed in the vicinity of sides of the second direction. The stage is disposed over the second driving units such that the stage is driven in the second direction. The third driving unit is spaced apart from the stage and the anchor unit, and extended from both sides of the first driving units into a single body such that the third driving unit drives the stage in the first direction when the first driving units are driven in the first direction. The first direction transform spring unit is arranged such that the first driving units are supported at an inner surface of the anchor unit and the first driving units are transformable in the first direction. The second direction transform spring unit is arranged such that the second driving units are supported at an inner surface of the third driving unit and the second driving units are transformable in the second direction.