GRIPPER ARM OF SMIF SYSTEM AND CASSETTE TRANSFER METHOD USING THE SAME TO GUARANTEE STABLE TRANSFER OF CASSETTE

摘要

PURPOSE: A gripper arm of an SMIF(standard mechanical interface) system is provided to guarantee a stable transfer of a cassette by installing the first and second contact detecting units like a micro switch capable of detecting a contact of the cassette in each end of a pair of grips included in a gripper arm. CONSTITUTION: A cassette(301) is transferred from a gripper arm of an SMIF apparatus to unit process equipment and vice versa. A contact detecting unit(313) is mounted on a side of a grip that supports a hanging piece(301a) included in the cassette. A control unit controls an electrical signal from the contact detecting unit and controls a cassette attach/detach command from the gripper arm, included in a side of the SMIF apparatus.