WAFER TRANSPORTATION SYSTEM OF HEAT TREATMENT EQUIPMENT HAVING SIMPLIFIED STRUCTURE TO REDUCE WAFER TRANSFER SECTION AND NUMBER OF COMPONENTS TO TRANSFER WAFER

摘要

PURPOSE: A wafer transportation system of heat treatment equipment is provided to reduce a wafer transfer section and transfer rapidly a wafer by forming the wafer transportation system with a carrier input/output part, a carrier station, and a wafer transfer. CONSTITUTION: A carrier input/output part(40) is provided to locate a carrier by aligning and supporting a sequentially loaded carrier. A carrier station(50) is selectively rotated to load or unload the carrier received from the carrier input/output part(40) according to a rotating position thereof. A wafer transfer is provided to transfer a wafer between the carrier and a boat, which are loaded on a carrier stage.