METHOD AND APPARATUS FOR CARRYING IN/OUT SUBSTRATE AND METHOD AND APPARATUS FOR TRANSFERRING SUBSTRATE TO RAPIDLY CARRY IN/OUT SUBSTRATE

摘要

PURPOSE: An apparatus for carrying-in/out a substrate is provided to rapidly carry in/out a substrate by simplifying the structure of a substrate carrying-in/out apparatus and by reducing the occupancy area of the substrate carrying-in/out apparatus. CONSTITUTION: A substrate carrying-in/out apparatus(1) carries a substrate(A) in/out a receptacle(10) for receiving the substrate. A placement unit(31) in which the substrate is placed is adjacent to the receptacle. A support part(32) supports the substrate, installed in a manner that the support part can transfer on the placement unit in the carrying-in/out direction of the substrate. A substrate support unit supports the substrate supported by the support part in a manner that the substrate can transfer on the placement unit in the carrying-in/out direction.