| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece discharging device capable of coping with a demand for achieving high discharge speed accompanying extremely minute size of a workpiece and realizing the compact device. SOLUTION: A shutter plate 7 is constituted by a metallic plate and piezoelectric ceramics 6a, 6b are bonded on its both faces to form a bimorph type piezoelectric actuator 10 using the shutter plate 7 as a shim member. The bimorph type piezoelectric actuator 10 curves (bends) the shutter plate 7 by applying the characteristic that the piezoelectric ceramics 6a, 6b are elongated and contracted by applying a voltage (action of electric field) and letting electric field act on the piezoelectric ceramics 6a, 6b bonded on both faces of the shutter plate 7 to open and close a shutter 7a. COPYRIGHT: (C)2005,JPO&NCIPI
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