| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost manufacturing method for a highly precise nozzle plate using a single crystal silicon substrate, and to provide an inkjet head using the nozzle plate manufactured by the manufacturing method, and an inkjet recording device having the inkjet head mounted. SOLUTION: In the method, the nozzle plate 3 with a nozzle hole 11 for discharging a solution is manufactured by carrying out etching to the single crystal silicon substrate 3a. The method includes a process of thinning the single crystal silicon substrate 3a by etching the whole of at least one face of the single crystal silicon substrate 3a which becomes the nozzle plate 3. COPYRIGHT: (C)2005,JPO&NCIPI
|
