| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize compatibility of an easy temperature control and a precise temperature control. <P>SOLUTION: A power regulator 16 to control a filament electric power to be supplied to a filament 9 is provided, and in temperature-elevation of a heating plate 2, while measuring an emission current flowing between the filament 9 and the heating plate 2 with an emission current adjustor 17, the emission current is controlled to be a prescribed value set beforehand by the power regulator 16. Furthermore, while measuring the temperature of the heating plate 2, after the measured temperature reaches the prescribed temperature set beforehand, while measuring the temperature of the heating plate 2 by the temperature adjustor 18, the temperature of the heating plate 2 is controlled to become the setting temperature by the power regulator 16. In this case, a switch 19 is switched by the temperature measurement value measured by the temperature adjustor 18 reaching the setting temperature. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
