发明名称 HOLDING DEVICE FOR DISK-LIKE OBJECT
摘要 PROBLEM TO BE SOLVED: To provide a holding device which is capable of being easily incorporated into any manufacturing equipment, as it is formed in a manner which is as space-saving as possible as well as assuring firmly holding an object in stoppage or in rotation. SOLUTION: At least one opening mechanism (100) and at least one pretension element (12) are incorporated into a holding arm fixing means (2) positioned at center and/or holding arms (7). COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005057297(A) 申请公布日期 2005.03.03
申请号 JP20040232027 申请日期 2004.08.09
申请人 NANOPHOTONICS AG 发明人 SIEBERT SONKE;SCHWEIGER MICHAEL;LANG ANDREAS
分类号 H01L21/683;B01L9/00;B23Q3/00;B25B11/00;H01L21/68;H01L21/687;(IPC1-7):H01L21/68 主分类号 H01L21/683
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