发明名称 |
HOLDING DEVICE FOR DISK-LIKE OBJECT |
摘要 |
PROBLEM TO BE SOLVED: To provide a holding device which is capable of being easily incorporated into any manufacturing equipment, as it is formed in a manner which is as space-saving as possible as well as assuring firmly holding an object in stoppage or in rotation. SOLUTION: At least one opening mechanism (100) and at least one pretension element (12) are incorporated into a holding arm fixing means (2) positioned at center and/or holding arms (7). COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2005057297(A) |
申请公布日期 |
2005.03.03 |
申请号 |
JP20040232027 |
申请日期 |
2004.08.09 |
申请人 |
NANOPHOTONICS AG |
发明人 |
SIEBERT SONKE;SCHWEIGER MICHAEL;LANG ANDREAS |
分类号 |
H01L21/683;B01L9/00;B23Q3/00;B25B11/00;H01L21/68;H01L21/687;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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