| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing device susceptor which is improved in the durability of an electrode for feeding an electric power to a conductor formed in the inside and/or on the surface of a ceramic heater, and furthermore prevents a short circuit from occurring between the electrodes, and also to provide a semiconductor manufacturing device mounted with the same. SOLUTION: When the electrodes for feeding an electric power to the conductor formed in the inside and/or on the surface of a ceramic heater are formed with an integrated structure, the electrodes is improved in durability. Furthermore, when a cylindrical body is provided so as to surround the electrodes, a short circuit is prevented from occurring. When inert gas is introduced into the inside of the cylindrical body, the electrodes is further improved in reliability. The susceptor, configured as above, is provided in the semiconductor manufacturing device, whereby the semiconductor manufacturing device is improved in productivity and yield. COPYRIGHT: (C)2005,JPO&NCIPI |
