发明名称 DEFLECTOR AND ITS DRIVE METHOD AS WELL AS CHARGED PARTICLE BEAM EXPOSURE SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a deflector with less noise in driving. SOLUTION: As for a CY, two coils of an outside coil 2 and an inside coil 3 are formed at a vane 1 made of a plate insulator. And as for a PY, two coils of an outside coil 5 and an inside coil 6 are formed at a vane 4 made of a plate insulator. A length of the outside coils 2, 5 in a light axis 7 direction is set longer than that of the inside coils 3, 6 in a light axis 7 direction. Therefore, when the same current is passed in the outside coils 2, 5, and the inside coils 3, 6, a deflecting field formed by the outside coils 2, 5 is larger than that formed by the inside coils 3, 6. Further, it is so constructed that the outside coil 2 of the CY and the inside coil 6 of the PY are connected in series and driven by current I<SB>1</SB>of a first power supply 8, and the inside coil 3 of the CY and the outside coil 5 of the PY are connected in series and is driven by current I<SB>2</SB>of a second power supply 9. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005056788(A) 申请公布日期 2005.03.03
申请号 JP20030288858 申请日期 2003.08.07
申请人 NIKON CORP 发明人 NAKANO KATSUSHI
分类号 G03F7/20;H01J37/147;H01J37/305;H01L21/027;(IPC1-7):H01J37/147 主分类号 G03F7/20
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