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发明名称
APPARATUS AND METHOD FOR THERMALLY ISOLATING A HEAT CHAMBER
摘要
申请公布号
KR20050019921(A)
申请公布日期
2005.03.03
申请号
KR20057001257
申请日期
2005.01.24
申请人
发明人
分类号
H01L21/00;H01L21/02;H01L21/68;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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