| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a speed detection device capable of miniaturizing the occupancy area of the speed detection device for detecting two axial angular velocity. <P>SOLUTION: A 1st vibration electrode 3 and a 2nd vibration electrode 4 arranged along the normal line of the device substrate (Z axis) are vibrated mutually in reverse phase in a direction of Z axis, while being supported on the device substrate displaceably in X axis and Y axis directions. At the same height in Z axis of the 1st vibration electrode 3 and in a positive X axis direction, a 1st X axis electrode 5 is arranged, and in a positive Y direction, a 1st Y axis electrode 7 is arranged. At the same height in Z axis of the 2nd vibration electrode 4 and in the negative X axis direction, a 2nd X axis electrode 6 is arranged, and in the negative Y direction, a 2nd Y axis electrode 8 is arranged. The force acting in the X axis direction is detected from the capacitance between the 1st vibration electrode 3 to the 1st X axis electrode 5, and the capacitance between the 2nd vibration electrode 4 to the 2nd X axis electrode 6. The force acting in Y axis direction is detected from the capacitance between the 1st vibration electrode 3 to the 1st Y axis electrode 7, and the capacitance between the 2nd vibration electrode 4 to the 2nd Y axis electrode 8. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
