ELECTROCHEMICAL MACHINING APPARATUS AND ELECTROCHEMICAL MACHINING METHOD

摘要

PROBLEM TO BE SOLVED: To electrochemical-machine even a vulnerable material so as not to destroy a device formed on a substrate; and to further uniformize the machined amount within the surface of the substrate and the roughness of the surface after having been machined, by increasing the uniformity of a contact pressure of an electrode onto the substrate during machining. SOLUTION: This electrochemical machining apparatus comprises a substrate-holding part 42 for holding the substrate; an electrode base 62 provided with an electrode member 60 which machines the substrate held by the substrate-holding part 42 while contacting with the substrate in the presence of a liquid; and a support base 70 for float-supporting the electrode base 62 through a float mechanism 72. COPYRIGHT: (C)2005,JPO&NCIPI