| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of measuring a refractive index and a thickness of a film quickly and precisely. SOLUTION: Light is made to get incident into the thin film in one side of a multi-layer film, and the refractive index is calculated using ln ¾X¾=0 as an evaluation function by a numeral solution method, using count numbersΨ<SB>r</SB>,Δ<SB>r</SB>of ellipsometry provided by measuring reflected light, where X is a root of a quadratic equation aX<SP>2</SP>+bX+c=0 using a=B<SB>2</SB><SP>s</SP>A<SB>2</SB><SP>p</SP>ρ<SB>r</SB>-B<SB>2</SB><SP>p</SP>A<SB>2</SB><SP>s</SP>, b=(B<SB>1</SB><SP>s</SP>A<SB>2</SB><SP>p</SP>+B<SB>2</SB><SP>s</SP>A<SB>1</SB><SP>p</SP>)ρ<SB>r</SB>-B<SB>1</SB><SP>p</SP>A<SB>2</SB><SP>s</SP>+B<SB>2</SB><SP>p</SP>A<SB>1</SB><SP>s</SP>, c=B<SB>1</SB><SP>s</SP>A<SB>1</SB><SP>p</SP>ρ<SB>r</SB>-B<SB>1</SB><SP>p</SP>A<SB>1</SB><SP>s</SP>as coefficients, whereρ<SB>r</SB>=tanΨ<SB>r</SB>exp(-jΔ<SB>r</SB>), and where A<SB>i</SB><SP>k</SP>, B<SB>i</SB><SP>k</SP>(i=1 or 2, k=s or p) are found as matrix elements of a scattering matrix S<SB>m</SB>(=I<SB>01</SB>L<SB>1</SB>I<SB>12</SB>S'<SB>m-1</SB>) calculated from a characteristic matrix I<SB>01</SB>of a boundary face between a medium passed through with the incident light and the thin film, a characteristic matrix L<SB>1</SB>of the thin film, a characteristic matrix I<SB>12</SB>of a boundary face between the multi-layer film other than the thin film and the thin film, and a pseudo-scattering matrix S'<SB>m-1</SB>of the multi-layer film other than the thin film. COPYRIGHT: (C)2005,JPO&NCIPI
|
