CIRCUIT BOARD INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a circuit board inspection device capable of easily and precisely inspecting a circuit board of an inspection object. SOLUTION: This device comprises a contact type probe; a probe moving mechanism for enabling the tip Ha of the probe to make contact with a conductor pattern Pa of the circuit board; a measurement part for outputting a signal to the probe to measure the electrostatic capacity between the probe and a reference electrode; and a control part for controlling the probe moving mechanism and also inspecting the circuit board based on the measured electrostatic capacity. The control part executes a first measurement processing (step 21) for bringing the tip Ha of the probe into contact with the conductor pattern Pa to measure an electrostatic capacity C1; a second measurement processing (step 22) for bringing the tip Ha into contact therewith in an energized state to measure an electrostatic capacity C2; and a first calculation processing for calculating the differential value C3 between the electrostatic capacities C1 and C2. COPYRIGHT: (C)2005,JPO&NCIPI