| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce an updating period in a spatial optical modulation device in an exposure apparatus which performs exposure by relatively moving an exposure head along the exposure plane, the exposure head having a spatial light modulation device having a great number of micromirrors arranged thereon to modulate the incident light in accordance with inputted control signals. <P>SOLUTION: In the micromirrors arranged in 768 rows along the scanning direction of a DMD (digital micromirror device) 50, only 192 rows are used, and moreover, the 192 rows are divided into five regions (region 1 to 5). While control signals are successively transferred from the region 1 to the region 5, the micrromirrors are successively reset on a region-by-region basis from the region where the transfer is completed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
