FERROELECTRIC MEMORY CHARACTERISTIC CHANGING METHOD AND FERROELECTRIC MEMORY MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a ferroelectric memory characteristic changing method capable of imprinting in a time shorter than a conventional imprinting time and supplementing the reduction of a polarizing amount due to relaxation effect to improve reading characteristics, in a ferroelectric memory. SOLUTION: The ferroelectric capacitor is heated so as to become a predetermined temperature or a high-temperature state and intermittent electric field is impressed on the ferroelectric capacitor at the high-temperature state. COPYRIGHT: (C)2005,JPO&NCIPI