PHOTO-RESIST SUPPLYING APPARATUS SUPPLYING CONTINUOUSLY NITROGEN GAS TO INTERIOR OF NOZZLE USING BUBBLE GENERATING RESTRAINER

摘要

PURPOSE: A photo-resist supplying apparatus is provided to prevent the shortage of injection amount due to a bubble by supplying continuously nitrogen gas to the interior of nozzle using a bubble generating restrainer. CONSTITUTION: A photo-resist is stored in a supply tank(1). The supply tank is communicated with a buffer tank(5). The photo-resist stored in the buffer tank is forcibly pumped by a pump(11). The photo-resist pumped by the pump is injected through a injection nozzle(15). A generation of bubble from the interior of the injection nozzle is prevented by a bubble generating restrainer(20).