发明名称 OPTICAL MEMBER, ILLUMINATOR, AND ALIGNER HAVING OPTICAL MEMBER
摘要 PROBLEM TO BE SOLVED: To provide an optical member realizing the prevention of the damage of its fine structure, and also the restraint of the adhesion of dust. SOLUTION: The optical member is characterized by including a substrate, all over the surface of which an optical element part having specified optical action on incident luminous flux is directly formed, and a protection member having a transmission part through which the luminous flux is transmitted and housing the base plate. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005055798(A) 申请公布日期 2005.03.03
申请号 JP20030288567 申请日期 2003.08.07
申请人 CANON INC 发明人 MIZOUCHI SATOSHI
分类号 G02B5/18;G02B3/00;G03F7/20;H01L21/027;(IPC1-7):G02B3/00 主分类号 G02B5/18
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