| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a high performance liquid ejection head in which a bonding process and bonding error are eliminated and occurrence of crosstalk, and the like, is prevented as much as possible by making an isolated pressure transmitting part integrally with a structure constituting a pressure chamber, and the like. SOLUTION: A liquid ejection head comprising a liquid channel having a plurality of pressure chambers 4 communicating with a plurality of liquid ejection ports 2, respectively, and a plurality of piezolectric vibrators 11 corresponding to the plurality of pressure chambers 4, respectively, through isolated pressure transmitting parts (island parts) 6 is manufactured according to following steps. A liquid channel pattern is formed and a coating layer is provided thereon, a transmission layer becoming an island part 6 is formed on the coating layer, and then a plurality of piezolectric vibrators 11 are provided on the transmission layer. Subsequently, the liquid channel pattern is removed to form a plurality of pressure chambers 4, the transmission layer is removed except the parts corresponding to the plurality of pressure chambers 4 thus forming the island part 6. COPYRIGHT: (C)2005,JPO&NCIPI
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