| 摘要 |
A vacuum pump of the invention comprises, in a common pump body (100): molecular drag pump stages (5) in series with regenerative pump stages (9). The molecular drag pump stages (5) comprise a molecular drag rotor (5a) including a blind axial cavity (5c) open towards the downstream end, and the motor (7) is housed at least in part in said blind axial cavity (5c). The drive shaft (8) is coupled via its upstream end (8a) to the molecular drag rotor (5a), and it is coupled via its downstream portion (8b) to the regenerative rotor (9a). The motor (7) is secured to the central segment of the drive shaft (8). This provides a universal pump of small size, enabling pumping to be performed from 1000 mbar down to 10<-8 >mbar, and suitable for being placed in the vicinity of a vacuum chamber.
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