| 发明名称 |
ELECTRONIC DEVICE, SUBSTRATE THEREFOR, AND METHOD FOR MANUFACTURING THEM |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize a substrate for an electronic device which has a conductor film excellent in both crystallinity and adhesiveness to a substrate, and the electronic device. <P>SOLUTION: The substrate 10 for an electronic device comprises the substrate 11, an adhesion film 12 laminated on the substratum 11, and the conductor film 13 laminated on the adhesion film 12. The adhesion film 12 is a non-epitaxial film containing crystals of a wurtzite type crystal structure. The electronic device comprises the substrate 10 for an electronic device, and a functional film which is arranged on the substrate 10 and has predetermined function. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
| 申请公布号 |
JP2005056940(A) |
申请公布日期 |
2005.03.03 |
| 申请号 |
JP20030206559 |
申请日期 |
2003.08.07 |
| 申请人 |
TDK CORP |
发明人 |
NOGUCHI TAKAO;SAITO HISATOSHI;ABE SHUSUKE |
| 分类号 |
H01L21/28;B06B1/06;H01L21/283;H01L21/8246;H01L27/105;H01L41/09;H01L41/187;H01L41/22;H01L41/29;H01L41/319;H03H3/02;H03H9/02;H03H9/17 |
主分类号 |
H01L21/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
