| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for accurately and surely predicting the diffusion of a target substance in a crystal substrate by a small number of calculations. SOLUTION: The method for predicting the diffusion of the annealed target substance in the crystal substrate by calculation comprises steps of assuming a plurality of diffusion seeds, apportioning an annealing time into a plurality of segments of time, apportioning each diffusion seed into a first element and a second element by every segment of time, setting a time intervalΔt in the calculation, setting parameters (step S101 to S108) relating to a time for predicting the diffusion of the target substance depending on the annealing time T, and calculating on the basis of the set points. COPYRIGHT: (C)2005,JPO&NCIPI
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