| 摘要 |
The aim of the invention is to provide a method allowing generation of periodic curved structures in a basic support material such as the basic layer for the magnetic bit cells of a magnetic storage device. This aim is achieved according to the invention by a method for generating a periodic circular structure for a support (12) for a magnetic storage device, comprising: a) generating a number of masks with each mask having at least one transmission diffraction gratings (4, 6, 8, 20 to 34, 38, 42, 46)) each having a different periodic concentric circular and/or spiral-like periodic pattern and/or a periodic radial spoke pattern; b) positioning of one or more of said diffraction masks (4, 6, 8, 20 to 34, 38, 42, 46) simultaneously or successively in a certain distance of a basic support material (12) to be patterned; c) applying light beams through each of the diffraction masks (4, 6, 8, 20 to 34, 38, 42, 46) for exposuring the basic support material to said light beam; d) interfering the different light beams diffracted by the gratings on each mask in order to generate coincident light intensity pattern on the surface of the basic support material (12); and e) optionally repeating the exposure procedure a number of times with different masks to obtain a desired pattern of a periodic circular structure with possible partitioning in the circumferential direction. |
