MICROMACHINED APPARATUS UTILIZING BOX SUSPENSIONS

摘要

A micromachined gyroscope makes use of Coriolis acceleration to detect and measure rotation rate about a plane normal to the surface of a substrate. Specifically, various resonating structures are suspended within a frame. Rotation of the micromachined gyroscope about the plane produces a rotational force on the frame. The frame is suspended in such a way that its motion is severely restricted in all but the rotational direction. Stress reducing means are provided for reducing stresses in the suspension means.