MULTI-STAGE VERTICAL APPARATUS FOR WET PROCESS OF FLAT PANEL DISPLAY CAPABLE OF PROCESSING SUBSTRATE ARRANGED IN VERTICAL DIRECTION

摘要

PURPOSE: A multi-stage vertical apparatus is provided to reduce the area occupied by the apparatus and costs by processing a substrate arranged in a vertical direction through multiple steps. CONSTITUTION: A multi-stage vertical apparatus comprises a loader/unloader unit(1), a transfer unit(2), and a processing unit(3). The loader/unloader is arranged to load/unload a substrate(10) of a flat panel display. The transfer unit transfers the substrate to the processing unit and receives the processed substrate from the processing unit. The transfer unit includes a plurality of transfer boards(2a,2b,2c,2d) which stand upright in parallel with each other such that the transfer boards reciprocate in forward and rearward directions. The processing unit includes a plurality of processing boards(3a,3b,3c,3d) which stand upright in parallel with each other so as to process the substrate.